Product Category

Glass category

The microfluidic glass chip, also known as quartz/glass microfluidic chip, is based on borosilicate glass, fused silica and soda lime glass. Through wet etching, dry etching, photolithography, precision drilling, high temperature bonding and other processes, the microfluidic glass chip can prepare micro fluid channels, reaction chambers, micro valves, microelectrodes, separation columns, filter arrays and other microstructures inside the glass sheet. Relying on the excellent optical, electrochemical and chemical stability of the glass, it can realize the whole process miniaturization operations such as the separation, reaction, detection, cell culture, chromatography and analysis of micro samples (nL~μ L level). It is the core chip carrier of high-end scientific research, in vitro diagnostic precision analysis, chromatography-mass spectrometry, and single cell analysis in the laboratory.

Glass Wafer Level Microfluidic Chip is a high-end microfluidic platform that uses standard semiconductor round glass wafer (4/6/8-inch borosilicate glass, fused silica wafer) as the substrate, relies on semiconductor MEMS full process micro/nano processing (photolithography, etching, TGV glass through-hole, wafer level bonding, wafer surface modification), arrays dozens to hundreds of independent microfluidic units on the whole wafer at one time, and finally slices and cuts into a single finished chip. It belongs to wafer level mass production glass microfluidic, which is different from the traditional glass chip manually processed by a single small size glass chip.